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Lift‐Off PMN–PT Thick Film for High‐Frequency Ultrasonic Biomicroscopy
Author(s) -
Zhu Benpeng,
Han Jiangxue,
Shi Jing,
Shung Koping Krik,
Wei Qing,
Huang Yuhong,
Kosec Marija,
Zhou Qifa
Publication year - 2010
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2010.03873.x
Subject(s) - materials science , dielectric , piezoelectricity , composite material , ferroelectricity , dielectric loss , ultrasonic sensor , polarization (electrochemistry) , transducer , optoelectronics , acoustics , chemistry , physics
Piezoelectric 0.65Pb(Mg 1/3 Nb 2/3 )O 3 –0.35PbTiO 3 (PMN–35PT) thick film with a thickness of approximately 12 μm has been deposited on the platinum‐buffered Si substrate using a sol–gel composite method. The separation of the film from the substrate was achieved using a wet chemical method. The lifted‐off PMN–35PT thick film exhibited good dielectric and ferroelectric properties. At 1 kHz, the dielectric constant and the dielectric loss were 3326 and 0.037, respectively, while the remnant polarization was 30.0 μC/cm 2 . A high‐frequency single‐element acoustic transducer fabricated with this film showed a bandwidth at −6 dB of 63.6% at 110 MHz.