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Fabrication of BaTiO 3 Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route
Author(s) -
Wagata Hajime,
Taniguchi Takaaki,
Gallage Ruwan,
Subramani A. K.,
Sakamoto Naonori,
Watanabe Tomoaki,
Yoshimura Masahiro,
Matsushita Nobuhiro
Publication year - 2010
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2009.03383.x
Subject(s) - barium titanate , materials science , raman spectroscopy , annealing (glass) , tetragonal crystal system , thin film , amorphous solid , fabrication , chemical engineering , scanning electron microscope , phase (matter) , dielectric , nanotechnology , crystallography , composite material , chemistry , optics , optoelectronics , organic chemistry , medicine , physics , alternative medicine , engineering , pathology
This paper reports on the fabrication of barium titanate (BaTiO 3 ) thin films using a precursor solution containing Ba and Ti alkoxides. l ‐proline was used to prevent the precipitation of Ba and Ti alkoxides in a mixed solvent of ethanol and butylcarbitol under ambient conditions. Analysis of X‐ray diffraction and Raman spectra revealed that the as‐deposited amorphous film crystallized into a tetragonal BaTiO 3 phase after annealing at 650°C in air. Scanning electron microscopic observations showed that the BaTiO 3 film was free from cracks even after annealing and exhibited good adhesion to the substrate. Because the precursor solution developed was sufficiently stable in air, dot patterning of BaTiO 3 was also performed using an inkjet system.