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Surface Composition and Imprint in CSD‐Based PZT Films
Author(s) -
Etin Aleksey,
Shter Gennady E.,
Brener Reuven,
Baltianski Sioma,
Grader Gideon S.
Publication year - 2007
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2007.02056.x
Subject(s) - x ray photoelectron spectroscopy , pyrochlore , layer (electronics) , materials science , surface layer , analytical chemistry (journal) , sputtering , chemical composition , deposition (geology) , composition (language) , thin film , chemical engineering , chemistry , nanotechnology , geology , paleontology , organic chemistry , sediment , engineering , phase (matter) , linguistics , philosophy , chromatography
Reports on PZT films often suggest the contradicting presence of Pb‐deficient pyrochlore (Py) and a Pb‐rich layer on the surface. We show that standard Ar + ion sputtering X‐ray photoelectron spectroscopy (XPS) depth profiles of PZT films artificially exhibit a Pb‐rich surface, independent of actual Pb content of the chemical solution deposition solution. However angle‐resolved XPS measurements reveal that films derived from solutions with 10% Pb excess, which give rise to Py surface grains, actually have the expected Pb‐deficient surface layer. Alternatively, films derived from solutions with 30% Pb excess are Py free and have Pb‐rich surface layer. The Pb‐rich films show an increased imprint effect with increasing Pb content.