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Piezoelectric Film Response Studied with Finite Element Method
Author(s) -
Sato Harumichi,
Akedo Jun
Publication year - 2006
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2006.01295.x
Subject(s) - clamping , finite element method , piezoelectricity , materials science , bending , deformation (meteorology) , composite material , substrate (aquarium) , thin film , structural engineering , mechanical engineering , engineering , nanotechnology , oceanography , geology
It is difficult to measure accurately the piezoelectric constant, d 33 , of either a thin or thick film on a substrate, because piezoelectric deformation of a film is small. The measured value of d 33 for the film is often smaller than the value of d 33 for the bulk material. This is partly because of bending of the sample and side clamping of the film. However, we used finite element method (FEM) to simulate common experimental conditions and show that inner local deformation was more significant than either bending or side clamping. Using our FEM results, we propose optimum conditions for making unbiased d 33 measurements.