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Fabrication of High Aspect Ratio Ferroelectric Microtubes by Vacuum Infiltration using Macroporous Silicon Templates
Author(s) -
Bharadwaja S. S. N.,
Olszta M.,
TrolierMcKinstry S.,
Li X.,
Mayer T. S.,
Roozeboom F.
Publication year - 2006
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2006.01123.x
Subject(s) - materials science , ferroelectricity , silicon , fabrication , transmission electron microscopy , template , lanio , annealing (glass) , crystallization , scanning electron microscope , chemical engineering , composite material , nanotechnology , optoelectronics , dielectric , medicine , alternative medicine , pathology , engineering
Ordered arrays of high aspect ratio (>10:1) ferroelectric Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) tube structures were fabricated by vacuum infiltration of macroporous silicon (Si) templates. Improved phase purity was achieved when PZT microtubes were pyrolyzed at 300°C and partially released from the Si template to prevent a chemical reaction between the Pb and the Si during subsequent high‐temperature crystallization. The free‐standing microtubes were crystallized by rapid thermal annealing at 750°C for 1–3 min. Perovskite phase formation was confirmed by X‐ray diffraction and transmission electron microscopy methods. Coaxial structures comprised of metallic LaNiO 3 , PZT, and Pd layers were also processed to enable future electrical characterization of the ferroelectric microtubes.