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Controlled Elemental Depth Profile in Sol–Gel‐Derived PZT Films
Author(s) -
Etin Aleksey,
Shter Gennady E.,
Baltianski Sioma,
Grader Gideon S.,
Reisner George M.
Publication year - 2006
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2006.01078.x
Subject(s) - zirconium , materials science , titanium , sol gel , crystallization , decomposition , dielectric , thermal decomposition , hysteresis , elemental analysis , chemical engineering , metal , thin film , mineralogy , analytical chemistry (journal) , inorganic chemistry , chemistry , nanotechnology , metallurgy , chromatography , optoelectronics , organic chemistry , physics , quantum mechanics , engineering
Elemental depth profiles of PZT films prepared by two sol–gel formulations, differing in the zirconium precursor stabilization, were investigated by SIMS analysis. Early decomposition of the zirconium precursor yielded opposing gradients of zirconium and titanium, while simultaneous late decomposition of zirconium and titanium precursors provided profile uniformity. The gradients formed during initial crystallization are irreversible. Both types of films showed excellent hysteresis; however, uniform films exhibited a much higher dielectric constant, indicating superior piezoelectric properties. Non‐uniform films displayed a complex CV pattern, consistent with an inhomogeneous structure. Finally, thermal decomposition of the individual metal precursors is crucial for controlling film uniformity.