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Thermal Oxidation of Aluminum Nitride Powder
Author(s) -
Gu Zheng,
Edgar James H.,
Wang Chongmin,
Coffey Dorothy W.
Publication year - 2006
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2006.01065.x
Subject(s) - crystallinity , nitride , oxide , materials science , amorphous solid , aluminium , transmission electron microscopy , atmospheric temperature range , thermal oxidation , oxygen , chemical engineering , inorganic chemistry , layer (electronics) , metallurgy , chemistry , composite material , crystallography , nanotechnology , physics , organic chemistry , meteorology , engineering
The oxidation kinetics, morphology, and crystallinity of aluminum nitride (AlN) powder thermally oxidized in flowing oxygen were determined from 800° to 1150°C. At 800°C the oxidation became detectable with weight change. AlN powder was almost completely oxidized at 1050°C after only 0.5 h. Amorphous aluminum oxide formed at relatively low temperatures (800°–1000°C), with a linear oxidation rate governed by the oxygen–nitride interfacial reaction. Transmission electron microscopy displayed individual aluminum oxide grains which formed a discontinuous oxide layer at this temperature range. The aluminum oxide was crystalline at higher temperatures (>1000°C), as detected by X‐ray diffraction, and the density of oxide grains increased with temperature.