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Controlled Thickness Deposition of Ultrathin Ceramic Films by Spin Coating
Author(s) -
Leite Edson Roberto,
Lee Eduardo Jian Hua,
Ribeiro Caue,
Longo Elson
Publication year - 2006
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2006.00992.x
Subject(s) - materials science , ceramic , spin coating , nanoparticle , homogeneity (statistics) , coating , tin oxide , deposition (geology) , ellipsometry , nanocrystal , nanotechnology , thin film , composite material , oxide , chemical engineering , mineralogy , metallurgy , chemistry , paleontology , statistics , mathematics , sediment , engineering , biology
This work describes the combined use of nanocrystal water‐based colloidal suspensions with spin‐coating deposition in order to obtain ultrathin ceramic films. We have used tin oxide (SnO 2 ) nanoparticles, with particle diameter sizes ranging from 1–5.5 nm, to develop the deposition approach. Films obtained under several conditions were characterized by ellipsometry and atomic force microscopy, showing that the process has the ability to produce ultrathin ceramic films, with thickness ranging from 10–100 nm, with good particle packing. Additionally, electrical measurements in the films indicate good homogeneity and potential for various applications.