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Plasma Etching of Nano‐Structured Precursor‐Derived Ceramic Composites
Author(s) -
Lee SeaHoon,
Aldinger Fritz
Publication year - 2005
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2005.00537.x
Subject(s) - microstructure , materials science , nano , composite material , ceramic , scanning electron microscope , etching (microfabrication) , plasma etching , plasma , field electron emission , electron , physics , layer (electronics) , quantum mechanics
This paper reports on the analysis of the microstructure of precursor‐derived ceramics by plasma etching and field emission scanning electron microscopy. By applying this technique, the nano‐crystals in Si–C–N‐based ceramics and composites can be clearly observed without difficulty.