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Production of Nanocrystalline Titanium Nitride Powder by Atmospheric Microwave Plasma Torch in Hydrogen/Nitrogen Gas
Author(s) -
Shin Dong Hun,
Hong Yong Cheol,
Uhm Han Sup
Publication year - 2005
Publication title -
journal of the american ceramic society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1551-2916.2005.00523.x
Subject(s) - materials science , scanning electron microscope , titanium tetrachloride , nanocrystalline material , diffractometer , analytical chemistry (journal) , plasma torch , titanium , titanium nitride , crystallite , raman spectroscopy , nitride , tin , metallurgy , plasma , chemistry , composite material , nanotechnology , layer (electronics) , chromatography , physics , quantum mechanics , optics
Nanocrystalline titanium nitride (TiN) particles were directly synthesized in an atmospheric microwave plasma torch, using gas‐phase titanium tetrachloride (TiCl 4 ), with N 2 and H 2 as reactants. The gas‐phase TiCl 4 was injected with H 2 gas into the microwave plasma‐torch flame generated by N 2 swirl gas, and then the dark blue powders were deposited on the inner wall of the quartz tube. The synthesized powder samples were analyzed by scanning electron microscopy (SEM), SEM‐EDX, X‐ray diffractometer (XRD), transmission electron microscopy, and FT‐Raman. The average crystallite sizes of TiN measured from XRD patterns decreased from 15.5 to 11.6 nm, as the flow rate of H 2 injected into the microwave plasma torch increased from 0.03 to 0.3 liters per minute.