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A Method to Calibrate the Measured Responses by MEMS Accelerometers
Author(s) -
Badri A.,
Sinha J. K.,
Albarbar A.
Publication year - 2011
Publication title -
strain
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.477
H-Index - 47
eISSN - 1475-1305
pISSN - 0039-2103
DOI - 10.1111/j.1475-1305.2010.00764.x
Subject(s) - accelerometer , microelectromechanical systems , calibration , vibration , piezoelectric accelerometer , acoustics , amplitude , frequency domain , range (aeronautics) , frequency response , electronic engineering , computer science , engineering , materials science , electrical engineering , physics , optics , aerospace engineering , optoelectronics , piezoelectricity , piezoelectric sensor , quantum mechanics , computer vision , operating system
Micro‐electro‐mechanical system (MEMS) accelerometers have been receiving attention because of their low cost and small size. Accurate vibration measurements of both amplitude and phase at all frequencies in the measurement frequency range are important for the reliable vibration analysis. However, it has been observed that such accelerometers show some deviation. Hence, a simple calibration method in frequency domain has been used for correcting both amplitude and phase for the measured signals by the MEMS accelerometers. The paper presents the calibration procedure and results of this study applied on two MEMS accelerometers with different technical specifications.