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Challenges in MEMS Technology
Author(s) -
Pryputniewicz R. J.,
Merriam K. G.
Publication year - 2007
Publication title -
strain
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.477
H-Index - 47
eISSN - 1475-1305
pISSN - 0039-2103
DOI - 10.1111/j.1475-1305.2007.00405.x
Subject(s) - microelectromechanical systems , microelectronics , photolithography , process (computing) , mechanical engineering , computer science , engineering , manufacturing engineering , nanotechnology , electrical engineering , materials science , operating system