Premium
Dual‐channel heterodyne microscope: new functions
Author(s) -
PROTOPOPOV V.
Publication year - 2010
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.2010.03386.x
Subject(s) - microscope , polarizer , optics , heterodyne (poetry) , opacity , heterodyne detection , polarization (electrochemistry) , microscopy , wavelength , dual polarization interferometry , materials science , physics , computer science , telecommunications , chemistry , laser , acoustics , birefringence , antenna (radio)
Summary Quantitative assessment of critical dimensions of sub‐wavelength structures, dark‐field and bright‐field modes of operation, recognition of nonpatterned anisotropic surfaces, and three‐dimensional profiling of opaque and transparent samples are the new features of a super‐resolution dual‐channel heterodyne microscope that was introduced in a previous publication in this journal. The aforementioned modes of operation can be activated by simple rotation of a polarizer or insertion of a polarization‐separating prism. Various experimental results are presented, demonstrating new performance capabilities of the heterodyne microscope.