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Software image alignment for X‐ray microtomography with submicrometre resolution using a SEM‐based X‐ray microscope
Author(s) -
MAYO S.,
MILLER P.,
GAO D.,
SHEFFIELDPARKER J.
Publication year - 2007
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.2007.01857.x
Subject(s) - x ray microtomography , x ray , resolution (logic) , microscope , materials science , software , optics , computer science , physics , artificial intelligence , programming language
Summary Improved X‐ray sources and optics now enable X‐ray imaging resolution down to ∼50 nm for laboratory‐based X‐ray microscopy systems. This offers the potential for submicrometre resolution in tomography; however, achieving this resolution presents challenges due to system stability. We describe the use of software methods to enable submicrometre resolution of approximately 560 nm. This is a very high resolution for a modest laboratory‐based point‐projection X‐ray tomography system. The hardware is based on a scanning electron microscope, and benefits from inline X‐ray phase contrast to improve visibility of fine features. Improving the resolution achievable with the system enables it to be used to address a greater range of samples.