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New scintillation detector of backscattered electrons for the low voltage SEM
Author(s) -
WANDROL PETR
Publication year - 2007
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.2007.01782.x
Subject(s) - scintillation , electron , detector , physics , optics , secondary electrons , photon , scintillation counter , beam (structure) , energy (signal processing) , nuclear physics , quantum mechanics
Summary The new scintillation detector of backscattered electrons that is capable of working at primary beam energy as low as 0.5 keV is introduced. Low energy backscattered electrons are accelerated in order to generate a sufficient number of photons. Secondary electrons are deflected back by the energy filter so that the true compositional contrast of the specimen is obtained. The theoretical models of the detector function are described and first demonstration images are presented.