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High‐resolution compact X‐ray microscopy
Author(s) -
TAKMAN P. A. C.,
STOLLBERG H.,
JOHANSSON G. A.,
HOLMBERG A.,
LINDBLOM M.,
HERTZ H. M.
Publication year - 2007
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.2007.01765.x
Subject(s) - microscope , condenser (optics) , microscopy , materials science , optical microscope , optics , resolution (logic) , laser , detector , scanning electron microscope , physics , light source , artificial intelligence , computer science
Summary We demonstrate compact full‐field soft X‐ray transmission microscopy with sub 60‐nm resolution operating at λ= 2.48 nm. The microscope is based on a 100‐Hz regenerative liquid‐nitrogen‐jet laser‐plasma source in combination with a condenser zone plate and a micro‐zone plate objective for high‐resolution imaging onto a 2048 × 2048 pixel CCD detector. The sample holder is mounted in a helium atmosphere and allows imaging of both dry and wet specimens. The microscope design enables fast sample switching and the sample can be pre‐aligned using a visible‐light microscope. High‐quality images can be acquired with exposure times of less than 5 min. We demonstrate the performance of the microscope using both dry and wet samples.