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Transmission electron microscope specimen preparation for exploring the buried interfaces in plan view
Author(s) -
RADNÓCZI G. Z.,
PÉCZ B.
Publication year - 2006
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.2006.01707.x
Subject(s) - transmission electron microscopy , transmission (telecommunications) , electron microscope , materials science , ion milling machine , process (computing) , rotation (mathematics) , ion , optics , microscope , plan (archaeology) , electron , computer science , nanotechnology , chemistry , geology , physics , telecommunications , artificial intelligence , paleontology , organic chemistry , layer (electronics) , operating system , quantum mechanics
Summary A relatively easy and convenient process for the preparation of transmission electron microscope specimens of buried interfaces is described. The method is based on the alignment and realignment of the specimen rotation centre during ion milling. The ion‐milling time interval in which good samples are obtained is substantially extended in this way.