Premium
Wavelength‐ and energy‐dispersive Electron Probe Microanalysis (EPMA) measurements with non‐perpendicular incidence of the electron beam
Author(s) -
BASTIN G. F.,
OBERNDORFF P. J. T. L.,
HEIJLIGERS H. J. M.,
DIJKSTRA J. M.
Publication year - 2006
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.2006.01662.x
Subject(s) - monte carlo method , tilt (camera) , electron microprobe , wavelength , perpendicular , electron , optics , materials science , cathode ray , beam (structure) , energy (signal processing) , computational physics , physics , nuclear physics , geometry , statistics , mathematics , quantum mechanics , metallurgy
Summary A database of 416 wavelength‐ and energy‐dispersive EPMA measurements on tilted specimens of NiAl, TiO 2 and Ti 3 Al is presented. The analyses were performed between 10 and 30 kV and the tilt angles were varied between 0° and 60° in seven steps. The necessary hardware modifications for the specimen holder are discussed, as well as the various focusing techniques used in the measurements. A comparison between the experimental data, the calculations of our proza 96 t program and the results of Monte Carlo simulations shows that up to 50° tilt the predictions of our software are more than satisfactory. At larger tilt angles some deviations become noticeable. The Monte Carlo simulations appear to produce deviations at a somewhat earlier stage already, for reasons as yet unknown.