Premium
Nanoscale scanning transmission electron tomography
Author(s) -
MIDGLEY P. A.,
WEYLAND M.,
YATES T. J. V.,
ARSLAN I.,
DUNINBORKOWSKI R. E.,
THOMAS J. M.
Publication year - 2006
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.2006.01616.x
Subject(s) - electron tomography , scanning transmission electron microscopy , scanning confocal electron microscopy , nanoscopic scale , tomography , conventional transmission electron microscope , transmission electron microscopy , energy filtered transmission electron microscopy , high resolution transmission electron microscopy , optics , resolution (logic) , tomographic reconstruction , scanning electron microscope , materials science , diffraction , nanometre , diffraction tomography , electron diffraction , electron , transmission (telecommunications) , physics , nanotechnology , computer science , artificial intelligence , telecommunications , quantum mechanics
Summary Electron tomography enables the study of complex three‐dimensional objects with nanometre resolution. In materials science, scanning transmission electron microscopy provides images with minimal coherent diffraction effects and with high atomic number contrast that makes them ideal for electron tomographic reconstruction. In this study, we reviewed the topic of scanning transmission electron microscopy‐based tomography and illustrated the power of the technique with a number of examples with critical dimensions at the nanoscale.