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Crystallographic analysis of thin specimens
Author(s) -
SIVEL V. G. M.,
TICHELAAR F. D.,
MOHDADI H.,
ALKEMADE P. F. A.,
ZANDBERGEN H. W.
Publication year - 2005
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.2005.01475.x
Subject(s) - electron backscatter diffraction , materials science , transmission electron microscopy , characterization (materials science) , focused ion beam , resolution (logic) , diffraction , crystallography , sample preparation , copper , alloy , analytical chemistry (journal) , microstructure , optics , ion , metallurgy , chemistry , nanotechnology , physics , organic chemistry , chromatography , artificial intelligence , computer science
Summary Electron backscattering diffraction (EBSD) is commonly used on bulk samples for crystallographic material characterization. In this work, the technique was applied on transmission electron microscopy (TEM)‐type thin specimens, prepared with a focused ion beam. Orientation maps were successfully collected on specimens made of a Cu 3 Au copper–gold alloy. As compared to EBSD analysis on a bulk specimen, an improved pattern quality and a high spatial resolution (well below 10 nm) were obtained. Furthermore, a clear improvement of the signal‐to‐noise ratio with decreasing sample thickness was observed.