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Reflection conoscopy and micro‐ellipsometry of isotropic thin film structures
Author(s) -
SHATALIN S. V.,
JUŠKAITIS R.,
TAN J. B.,
WILSON T.
Publication year - 1995
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1995.tb03637.x
Subject(s) - isotropy , optics , reflection (computer programming) , ellipsometry , materials science , thin film , computer science , physics , nanotechnology , programming language
Summary The conoscopic image of isotropic thin film structures is discussed, and it is shown that, although the specimens may be optically isotropic, the conoscopic images are generally not angularly symmetric. Theoretical expressions for these patterns are derived and from which full ellipsometric data about the specimen are extracted. In addition, a variety of spatial filters which may be inserted into the optical system in order to enhance specific image contrast are recommended.