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Limits of electron probe formation
Author(s) -
CREWE A. V.
Publication year - 1995
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1995.tb03584.x
Subject(s) - limiting , scanning transmission electron microscopy , electron , limit (mathematics) , low voltage electron microscope , scanning electron microscope , optics , conventional transmission electron microscope , microscope , voltage , electron microscope , physics , materials science , nanotechnology , mathematics , quantum mechanics , engineering , mechanical engineering , mathematical analysis
SUMMARY The performance of many electron optical instruments is fundamentally limited by the dimensions of the focused probe. This is true of the scanning electron microscope and the scanning transmission electron microscope and, by inference, it may affect the transmission electron microscope. There has been very little improvement over the past few years and it seems reasonable to look for the explanation. It is possible to arrive at some simple expressions for the limiting performances of conventional instruments in a way that is independent of the design details and depends upon practical limits of field strength. Experiment and theory also appear to be in agreement with the fact that the limit for high‐voltage instruments has been reached, although there is still room for improvement for low voltages.