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Image‐EELS: Simultaneous recording of multiple electron energy‐loss spectra from series of electron spectroscopic images
Author(s) -
KÖRTJE K.H.
Publication year - 1994
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1994.tb03463.x
Subject(s) - electron energy loss spectroscopy , resolution (logic) , energy (signal processing) , electron microscope , electron , image resolution , optics , spectral line , spectroscopy , scanning transmission electron microscopy , stack (abstract data type) , high resolution transmission electron microscopy , transmission electron microscopy , energy filtered transmission electron microscopy , chemistry , materials science , physics , computer science , artificial intelligence , quantum mechanics , astronomy , programming language
Summary A new approach for element microanalysis with energy‐filtering transmission electron microscopy (EFTEM) is presented which was accomplished with the CEM 902 electron microscope (Zeiss, Germany). This method is called Image‐EELS, because it is a synthesis of electron energy‐loss spectroscopy (EELS) and electron spectroscopic imaging (ESI). Series of energy‐filtered images at increasing energy losses are recorded from one area with a TV camera. In a second step the intensity of selected regions in the image stack is measured with an image analysis system and plotted as a function of the energy loss. Thus many spectra from different objects can be calculated from one image series and compared with each other. The spatial resolution of EELS is considerably enhanced, the noise is decreased because many pixels from irregular objects are integrated, and the information from ESI can be analysed as a function of the energy loss.