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Calibration of an electron back‐scattering pattern set‐up
Author(s) -
LASSEN N. C. KRIEGER,
BILDESØRENSEN J. B.
Publication year - 1993
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1993.tb03331.x
Subject(s) - calibration , scanning electron microscope , scattering , optics , electron , point (geometry) , position (finance) , lattice (music) , physics , set (abstract data type) , computer science , mathematics , geometry , acoustics , quantum mechanics , finance , economics , programming language
Summary The determination of lattice orientations from electron back‐scattering patterns (EBSPs) in a scanning electron microscope (SEM) requires accurate knowledge of the position of the pattern centre and the source point to screen distance. This paper outlines a new procedure that enables the determination of these parameters for any given set‐up of the EBSP/SEM system. The calibration procedure simply requires the positions and indices of at least four poles in a pattern obtained from an arbitrary specimen, and eliminates the need for standard specimens or special attachments to the EBSP/SEM system. The pattern centre is shown to be located with a precision of approximately 0·5° and the source point to screen distance can be determined with a relative precision of approximately 0·5%.