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Optimum recording conditions in scanning microscopes
Author(s) -
Damm Tobias,
Wilhelmi Bernd
Publication year - 1992
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1992.tb04306.x
Subject(s) - optics , distortion (music) , microscope , scanning electron microscope , materials science , noise (video) , nanometre , image (mathematics) , physics , computer science , computer vision , optoelectronics , amplifier , cmos
SUMMARY The measuring process in the scanning microscope is analysed. The distortion of the recorded image due to finite diameter of the probe (laser spot, electron beam, nanometre tip) and due to the limited temporal response of the recording system is estimated. The influence of noise on the accuracy of the recorded image is considered. Optimum recording conditions such as choice of scan velocity and response time of the registration device are discussed with respect to minimum total error.