Premium
Experimental determination of light‐element k ‐factors using the extrapolation technique: Oxygen segregation in aluminium nitride
Author(s) -
Westwood A. D.,
Michael J. R.,
Notis M. R.
Publication year - 1992
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1992.tb03239.x
Subject(s) - extrapolation , aluminium , nitride , oxygen , materials science , spectroscopy , aluminium nitride , analytical chemistry (journal) , chemistry , metallurgy , physics , nanotechnology , mathematics , statistics , quantum mechanics , chromatography , organic chemistry , layer (electronics)
SUMMARY It is shown that quantitative light‐element ( Z < 10) analysis and κ‐factor determination of light elements can be routinely conducted, analogous to quantification of elements with Z >, using X‐ray energy‐dispersive spectroscopy. The extrapolation technique was used to determine the κ‐factors, κ OAI = 0.88 ± 0.10 and κ NAI = 1.61 ±0.22 at zero thickness. These values are found to be in good agreement with theoretically calculated κ‐factors. The limitations and applicability of the extrapolation technique for light‐element analyses are discussed. An example of light‐element quantification is provided in the analysis of oxygen segregation to inversion domain boundaries in aluminium nitride.