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Contrast in the electron spectroscopic imaging mode of a TEM
Author(s) -
Bakenfelder A.,
Fromm I.,
Reimer L.,
Rennekamp R.
Publication year - 1990
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1990.tb04773.x
Subject(s) - optics , inelastic scattering , contrast (vision) , materials science , scattering , electron microscope , resolution (logic) , chromatic aberration , acceleration voltage , energy (signal processing) , electron , physics , chromatic scale , cathode ray , computer science , quantum mechanics , artificial intelligence
SUMMARY An energy‐filtering microscope working at 80 keV is used for the investigation of the effect of inelastic scattering on Bragg contrast. Inelastic scattering results in a preservation of Bragg contrast but edge and bend contours are blurred by a spectrum of excitation errors due to the angular distribution of inelastic scattering. This blurring and the chromatic aberration results in a decrease of contrast and resolution for thick specimens. Therefore, contrast and resolution can be increased by zero‐loss filtering as shown by evaporated films of increasing thickness below 150 μg/cm 2 . Up to ∼300 μg/cm 2 an energy‐filtered image at the most probable energy shows the best results. The results obtained are extrapolated to energy‐filtered high‐voltage electron microscopy.