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Contact microscopy with a soft X‐ray laser
Author(s) -
Skinner C. H.,
DiCicco D. S.,
Kim D.,
Rosser R. J.,
Suckewer S.,
Gupta A. P.,
Hirschberg J.G.
Publication year - 1990
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1990.tb03018.x
Subject(s) - laser , photoresist , microscope , optics , materials science , scanning electron microscope , electron microscope , microscopy , resolution (logic) , nanotechnology , physics , computer science , artificial intelligence , layer (electronics)
SUMMARY A soft X‐ray laser of output energy 1–3 mJ at 18–2 nm was used to record high resolution images of biological specimens. The contact images were recorded on photoresist which was later viewed in a scanning electron microscope. A composite optical X‐ray laser microscope ‘COXRALM’ of novel design is also described.