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Theoretical prediction of the electron backscattering coefficient for multilayer structures
Author(s) -
August HansJürgen,
Wernisch Johann
Publication year - 1990
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1990.tb02962.x
Subject(s) - scanning electron microscope , homogeneous , electron , substrate (aquarium) , simple (philosophy) , scattering coefficient , computational physics , materials science , optics , physics , molecular physics , scattering , statistical physics , quantum mechanics , philosophy , oceanography , epistemology , geology
SUMMARY Based on existing formulae for the backscattering coefficient for coated samples, i.e. for samples consisting of one film on a massive homogeneous substrate, a theory for the backscattering coefficient for multilayer structures is derived in a clear mathematical way without using approximations. The resulting expression is simple and ready to be applied in scanning electron microscopy or other related analytical techniques.