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SEM—past, present and future
Author(s) -
McMullan D.
Publication year - 1989
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1989.tb02897.x
Subject(s) - scanning electron microscope , characterization (materials science) , nanotechnology , work (physics) , resolution (logic) , optics , engineering physics , materials science , computer science , engineering , physics , mechanical engineering , artificial intelligence
SUMMARY The development of the technology of the scanning electron microscope (SEM) is traced from the early pioneering work in the 1930s to the present day. Recent trends are described and, based on these, some speculative forecasts are made of possible future developments. It is suggested that these will include better vacuum conditions in conventional SEM to permit more accurate surface characterization, and improved electron optics for higher resolution, particularly with low‐voltage operation.