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Imaging an optical disc by the combined use of scanning tunnelling microscopy and scanning electron microscopy
Author(s) -
Bartolomé A.,
García R.,
Vázquez L.,
Baró A. M.
Publication year - 1988
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1988.tb01380.x
Subject(s) - scanning electron microscope , scanning tunneling microscope , microscopy , scanning confocal electron microscopy , resolution (logic) , scanning ion conductance microscopy , optics , electron microscope , materials science , characterization (materials science) , optical microscope , quantum tunnelling , focus (optics) , conventional transmission electron microscope , electron tomography , electron , nanotechnology , optoelectronics , scanning transmission electron microscopy , physics , computer science , artificial intelligence , quantum mechanics
SUMMARY We present the data obtained by scanning tunnelling microscopy combined with scanning electron microscopy of the digitally encoded structure on a stamper used to fabricate optical discs. The combination allows us to focus the STM tip on a preselected spot with a precision of ≅0·3 μm. The data show the superiority of STM for a more detailed characterization of shape, width, length, height and fine structure appearing on the sample. We also show the influence of tip shape on STM resolution. Simultaneous use of both microscopes is possible but high electron doses produce an insulating layer of contaminants thick enough to make STM operation impossible.