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Improvements in the fabrication of thin foil apertures for electron microscopy
Author(s) -
Fabergé A. C.
Publication year - 1987
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1987.tb02877.x
Subject(s) - fabrication , foil method , materials science , electron microscope , sputtering , evaporation , thin film , process (computing) , deposition (geology) , nanotechnology , optics , electron , optoelectronics , microscope , computer science , composite material , physics , medicine , paleontology , alternative medicine , pathology , sediment , thermodynamics , operating system , quantum mechanics , biology
SUMMARY Schabtach (1974) developed a process for making ‘thin’ (i.e. self‐cleaning) apertures for electron microscopes. Several improvements in this process are described, the most important of which is the deposition of a heavy metal by DC sputtering rather than by evaporation, making the process much easier.