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Scatter diagrams in energy analysed digital imaging: application to scanning Auger microscopy
Author(s) -
Gomati M. M. El,
Peacock D. C.,
Prutton M.,
Walker C. G.
Publication year - 1987
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1987.tb02827.x
Subject(s) - auger , optics , energy (signal processing) , bivariate analysis , signal (programming language) , characterization (materials science) , diagram , materials science , microscopy , computer science , physics , atomic physics , quantum mechanics , machine learning , programming language , database
SUMMARY In order to improve methods for the systematic characterization of inhomogeneous materials the procedures of multi‐spectral imaging and scatter diagram construction have been deployed. Although the techniques described are relevant to all instruments which detect signals on several different information channels (e.g. wavelength or energy analysed optical, X‐ray or electron imaging), they are illustrated with scanning Auger microscopy (SAM). The construction and use of bivariate correlation diagrams is described by reference to simple samples consisting of patterns of Al film upon Si substrates. The method is then applied to LaNi 5 and GaInAs samples each with different signal/noise ratios and chemical characteristics. The software windowing of scatter diagrams by computer combined with presentation of false colour images is demonstrated. The multi‐spectral Auger mapping (MUSLAM) procedure thus evolved is demonstrated to be a powerful, general analytical technique for characterizing the number, abundance and chemistry of each type of region in the surface of an inhomogeneous solid.