Premium
Reflection electron microscopy methods for the study of surface structure
Author(s) -
Hsu Tung,
Cowley J. M.,
Peng L.M.,
Ou H.J.
Publication year - 1987
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1987.tb01323.x
Subject(s) - reflection (computer programming) , optics , electron diffraction , resolution (logic) , electron microscope , materials science , diffraction , transmission electron microscopy , reflection high energy electron diffraction , microscopy , surface (topology) , energy filtered transmission electron microscopy , contrast (vision) , surface structure , electron , scanning transmission electron microscopy , chemistry , physics , molecular physics , geometry , mathematics , computer science , artificial intelligence , programming language , quantum mechanics
SUMMARY The techniques of reflection electron microscopy (REM) using TEM instruments and scanning reflection electron microscopy (SREM) using STEM instruments have been explored as means for the observation of surface structure with high spatial resolution, better than 1 nm in each case. Under the ordinary environment of a commercial TEM instrument, we have studied the contrast in REM images of atomic steps and made comparison with the calculated results from the multi‐slice dynamical diffraction theory. Comparison has also been made between the REM images of defects and the calculated images based on the column approximation. The influence of surface resonances on the contrast has been investigated. By SREM performed in a modified HB5 STEM with attached high vacuum preparation chamber, we have observed the formation of periodically distributed Pd particles on the surface of cleaved MgO.