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Elemental mapping with elastically scattered electrons
Author(s) -
Pennycook S. J.,
Berger S. D.,
Culbertson R. J.
Publication year - 1986
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1986.tb02804.x
Subject(s) - scanning transmission electron microscopy , channelling , scattering , electron , detector , diffraction , optics , atomic number , materials science , range (aeronautics) , impurity , contrast (vision) , elastic scattering , transmission electron microscopy , crystal (programming language) , computational physics , physics , atomic physics , nuclear physics , computer science , ion , quantum mechanics , composite material , programming language
SUMMARY We describe a technique for efficient, quantitative, standardless elemental mapping using a high‐angle annular detector in a scanning transmission electron microscope (STEM) to collect elastically scattered electrons. With a single crystal specimen, contrast due to thickness variations, diffraction, and channelling effects can be avoided, so that the resulting image contrast quantitatively reflects variations in impurity concentration. We compare a number of simple analytical approximations to the elastic scattering cross sections and show that a standardless analysis is possible over a wide range of atomic number and inner detector angle to an absolute accuracy of better than 20%.