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A double tilting cartridge for transmission electron microscopes with maximum solid angle of exit at the specimen
Author(s) -
Everatt P. G.,
Valdrè U.
Publication year - 1985
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1985.tb04658.x
Subject(s) - cartridge , microscope , optics , materials science , tube (container) , transmission electron microscopy , electron microscope , lens (geology) , solid angle , transmission (telecommunications) , cathode ray , electron , physics , electrical engineering , engineering , composite material , detector , metallurgy , quantum mechanics
SUMMARY A new type of double tilting cartridge for transmission electron microscopes (CTEMs and STEMs) is described, which has been designed with the following applications and requirements in mind: (i) observation of large specimens, in particular semiconductor devices carrying electrical leads for signal exploitation; (ii) maximum (2π) solid angle of beam exit subtended by the specimen; (iii) location of the specimen as low as possible in the pole piece gap of the objective lens. The working principle is based on the kinematics of a hemisphere resting on the end of a cylindrical tube, and can be applied to any type of electron microscope specimen holder of the top entry type.