Premium
An interference technique for measuring the thickness of semi‐thin and thick sections
Author(s) -
Robertson W. M.,
Storey B.,
Griffiths B. S.
Publication year - 1984
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1984.tb00475.x
Subject(s) - optics , interference (communication) , beam splitter , materials science , reflection (computer programming) , white light , displacement (psychology) , physics , computer science , channel (broadcasting) , psychotherapist , programming language , psychology , computer network , laser
SUMMARY An interference method is described for measuring section thickness in the range 0·3–45 μm. An incident illumination objective incorporating a beam splitter and adjustable reference mirror is used to generate interference fringes by reflection from the upper surfaces of sections on glass slides. Sections do not require a reflective coating. The lateral displacement of the zero‐order fringe generated using white light is measured in terms of sodium light fringes and photographic enlargement of the fringes allows measurement to ± 30 nm. The method is simple in operation and allows rapid assessment of any local distortions over the entire section area.