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The role of specimen and instrumental parameters in STEM‐EDS X‐ray microanalysis of thin foils
Author(s) -
Doig P.,
Flewitt P. E. J.
Publication year - 1983
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1983.tb04557.x
Subject(s) - microanalysis , foil method , electron probe microanalysis , materials science , sampling (signal processing) , acceleration voltage , analytical chemistry (journal) , metal , optics , electron , scanning electron microscope , metallurgy , chemistry , composite material , physics , cathode ray , nuclear physics , chromatography , detector , organic chemistry
SUMMARY The optimization of STEM‐EDS X‐ray microanalysis within thin metal foils can be achieved by control of the instrumental and specimen variables. The contribution of incident electron probe size, accelerating voltage and sampling frequency together with the specimen variable of foil thickness are discussed with reference to typically enountered microstructural features.