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Digital image processing of combined SEM and EDX signals
Author(s) -
Bauer B.,
Schwarz H.,
Thanh Nguyen
Publication year - 1983
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1983.tb04552.x
Subject(s) - thresholding , image processing , energy (signal processing) , optics , resolution (logic) , masking (illustration) , artificial intelligence , digital image processing , computer science , signal (programming language) , image (mathematics) , scanning electron microscope , moiré pattern , computer vision , biological specimen , noise (video) , materials science , physics , art , visual arts , quantum mechanics , programming language
SUMMARY Due to the complexity of biological tissue and man‐made materials, the limits of light microscopy in quantitative image analysis are often reached. The scanning electron microscope provides a much higher resolution in such situations, especially when using the low noise secondary electrons signal. However, secondary electrons are sensitive to topography rather than to the elements constituting the specimen. This effect usually makes discrimination of distinct phases or objects by simple grey value thresholding difficult or even impossible. The additional information given by an energy dispersive X‐ray system is the step to overcome this problem. The combination of both signals—grey level and energy dispersive information—leads to a masking procedure which eliminates image sections, not belonging to the phase under investigation, from the evaluation.