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Determination of the illuminating angle and defocus spread in transmission electron microscopy
Author(s) -
Tsuji M.,
Manley R. St. John
Publication year - 1983
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1983.tb04202.x
Subject(s) - optics , resolution (logic) , electron microscope , transmission electron microscopy , microscopy , divergence (linguistics) , diffraction , materials science , beam divergence , physics , beam (structure) , beam diameter , laser beams , computer science , laser , artificial intelligence , linguistics , philosophy
SUMMARY In high resolution electron microscopy the beam divergence and defocus spread are important factors determining the resolution limit of the microscope. In this paper a straightforward method is proposed to estimate the illuminating angle (beam divergence) and the parameter of defocus spread using optical diffraction patterns from a through focal series of electron micrographs of a thin amorphous film.