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An improved double‐tilt stage for the AEI EM7 high‐voltage electron microscope
Author(s) -
Turner J. N.,
Ratkowski A. J.
Publication year - 1982
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1982.tb00408.x
Subject(s) - tilt (camera) , clamping , optics , materials science , perpendicular , electron microscope , rod , voltage , vibration , acceleration voltage , microscope , coupling (piping) , resolution (logic) , scanning electron microscope , electron , acoustics , physics , composite material , computer science , structural engineering , cathode ray , medicine , geometry , mathematics , alternative medicine , pathology , quantum mechanics , artificial intelligence , engineering , computer vision
SUMMARY Vibration transmitted by the specimen rod of a side‐entry stage frequently decreases image resolution, and the length of the rod in the high‐voltage electron microscope can make the problem severe. A detachable tip clamped to the translation stage minimizes the effect, but eliminates the rod as a means of tilting. Furthermore, the second tilt mechanism is usually built into the rod. Thus the sample is coupled not clamped to the rod, increasing the effect. The image resolution attainable with our double‐tilt stage was 1·5 nm along the rod's axis and 5·0 nm perpendicular to it before modification. An isotropic resolution of 0·5 nm was achieved by attaching the specimen tip to the rod with a flexible coupling and clamping both ends of the tip to the translation ring. The couplings used transmit the torque to rotate the specimen holder but dampen vibration. Ion‐pumping the vacuum system with all other pumps off also improved specimen stability.