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Use of a multichannel pulse height analyser for the analysis of back‐scattered SEM images
Author(s) -
Hall M. G.,
Skinner G. K.
Publication year - 1981
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1981.tb01306.x
Subject(s) - analyser , contouring , detector , scintillator , signal (programming language) , optics , pulse (music) , densitometer , materials science , physics , computer science , computer graphics (images) , programming language
SUMMARY The use of a simple electronic switch to convert the video signal from a scanning electron microscope to a series of pulses is described. A multichannel pulse height analyser may then be used to perform quantitative image analysis. Examples are given showing how composition analysis, area fraction measurement and image contouring may be performed using the atomic number contrast signal from a back‐scattered electron detector. Other detector systems such as scintillators or specimen current imaging could also be used.