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The measurement of atomic number and composition in an SEM using backscattered detectors
Author(s) -
Ball M. D.,
McCartney D. G.
Publication year - 1981
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1981.tb01305.x
Subject(s) - microanalysis , electron probe microanalysis , atomic number , resolution (logic) , materials science , analytical chemistry (journal) , detector , range (aeronautics) , carbide , image resolution , optics , chemistry , physics , scanning electron microscope , atomic physics , metallurgy , computer science , organic chemistry , chromatography , artificial intelligence , composite material
SUMMARY The atomic number dependence of electron backscattering can be used as the basis of a microanalysis technique. The operating procedures and condition for quantitative measurements of specimen atomic number are outlined and an expression relating the accuracy of composition to the atomic number sensitivity has been derived. Some measurements of the spatial resolution of backscattered electron microanalysis are also presented and compared with the resolution of X‐ray microanalysis. Although the range of application of this technique is limited, where it can be applied it has the following advantages: (i) higher spatial resolution than X‐ray microanalysis for bulk specimens; (ii) very rapid measurement; (iii) can be applied to compounds of low atomic number elements, (e.g. borides, carbides, nitrides, etc.); (iv) specimen preparation is often relatively straightforward.