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Some aspects of quantitative STEM X‐ray microanalysis *
Author(s) -
Jones I. P.,
Loretto M. H.
Publication year - 1981
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1981.tb01300.x
Subject(s) - microanalysis , polishing , electron probe microanalysis , x ray , materials science , thin film , analytical chemistry (journal) , optics , nanotechnology , chemistry , electron microprobe , physics , metallurgy , chromatography , organic chemistry
SUMMARY Those aspects of quantitative X‐ray microanalysis of thin films which either differ from, or do not exist in, bulk specimen analysis are reviewed. Special emphasis is placed on electron trajectory‐linked effects, and on surface polishing films.