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Electron beam current measurement in the electron microscope
Author(s) -
Nicholson W. A. P.
Publication year - 1981
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1981.tb01207.x
Subject(s) - faraday cup , photometer , optics , faraday cage , electron microscope , electron , microscope , current (fluid) , cathode ray , materials science , electron beam induced current , beam (structure) , secondary electrons , electron beam induced deposition , scanning electron microscope , physics , scanning transmission electron microscopy , ion beam , magnetic field , quantum mechanics , thermodynamics
SUMMARY Two devices for measuring the beam current in an electron microscope are described; a Faraday cage rod for accurate absolute measurements in the specimen position and a collector plate mounted in the viewing chamber, which may be used continuously during experiments, for relative current measurements. Results of experiments to determine the effect of secondary electrons on, and choice of material of, the collector plate are presented. An example of the use of the collector plate as a photometer is given.