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X‐ray topography of large single crystals
Author(s) -
Dineen C.,
Jones F. J.,
Isherwood B. J.,
Wallace C. A.
Publication year - 1980
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1980.tb00287.x
Subject(s) - traverse , fabrication , optics , surface (topology) , x ray , materials science , silicon , crystal (programming language) , optoelectronics , computer science , geometry , physics , geology , mathematics , medicine , alternative medicine , geodesy , pathology , programming language
SUMMARY A requirement exists in the fabrication of certain electronic devices for non‐destructive examinations of the structural perfection of large single crystals. Two X‐ray topographical techniques which fulfill this requirement are described. A curved crystal transmission topography technique provides images of equivalent definition to those obtained by Lang topography, but with a very large gain in speed. This technique is restricted to the examination of flexible plates of uniform thickness and is particularly suited to silicon slices. A topographical method, incorporating an unorthodox scanning mode, has been applied to the assessment of the surface perfection of long crystals. Using this technique, crystals up to 205 mm in length have been examined on a suitably modified Lang camera of limited traverse capability.