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Prospects For Extending The Resolution Limit Of The Electron Microscope
Author(s) -
Glaeser Robert M.
Publication year - 1979
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1979.tb00232.x
Subject(s) - coherence (philosophical gambling strategy) , optics , brightness , microscope , limit (mathematics) , acceleration voltage , resolution (logic) , electron microscope , spherical aberration , voltage , physics , electron , computer science , cathode ray , artificial intelligence , mathematics , mathematical analysis , quantum mechanics , lens (geology)
SUMMARY The factors that limit the performance of present‐day high‐resolution electron microscopes include the source brightness, the temporal coherence of the illumination, and phase contrast ‘artefacts’ due to spherical aberration and defocus. Further advancement of the instrumental performance might be accomplished in different ways, including the use of high coherence conditions combined with image restoration; the use of higher accelerating voltages; the use of aberration correctors; or the use of conditions for incoherent image formation. Current efforts in each of these directions are reviewed, from which it is evident that the combined use of higher voltages and improved coherence is the direction that is presently leading to the greatest degree of progress.