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Electron Microscope Stage Design And Applications
Author(s) -
Valdrè U.
Publication year - 1979
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1979.tb00231.x
Subject(s) - characterization (materials science) , electron microscope , assertion , microscope , instrumentation (computer programming) , nanotechnology , scanning electron microscope , semiconductor , compatibility (geochemistry) , materials science , stage (stratigraphy) , optics , computer science , optoelectronics , physics , geology , composite material , programming language , operating system , paleontology
SUMMARY There is plenty of evidence that future developments in electron microscopy instrumentation will be strongly orientated towards in situ experimental versatility and multisignal exploitation. Based on this assertion, a layout is presented of the achievements in specimen chambers and stages, in attachments for analysis and non‐conventional imaging, and in miscellaneous accessories. Their compatibility and best location is discussed, and general considerations are made on stage design. An example is given of a multipurpose specimen chamber and of a multifunction electron microscope, together with some results of their application for the characterization of semiconductor devices.