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Optimized Energy Dispersive X‐Ray Microanalysis With A Siemens Elmiskop 102 Electron Microscope
Author(s) -
Hutchison J. L.,
Lucas J. H.
Publication year - 1979
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1979.tb00181.x
Subject(s) - microanalysis , siemens , tilt (camera) , optics , electron microscope , resolution (logic) , microscope , detector , lens (geology) , materials science , electron probe microanalysis , electron , scanning electron microscope , physics , chemistry , computer science , nuclear physics , engineering , mechanical engineering , organic chemistry , quantum mechanics , artificial intelligence
SUMMARY This paper describes modifications made to the objective lens of a Siemens Elmiskop 102 electron microscope which enable a Kevex Si(Li) detector to be brought to within 20 mm of the optic axis, and which give rise to a relatively‘clean’ X‐ray microanalysis system. The modifications do not affect the performance of high resolution, double‐tilt capability of the instrument.