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Modification of an EM6G electron microscope for X‐ray microanalysis
Author(s) -
Fitzgerald A. G.,
Storey B. E.
Publication year - 1979
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.1365-2818.1979.tb00153.x
Subject(s) - microanalysis , transmission electron microscopy , materials science , microscope , electron microscope , tilt (camera) , scanning electron microscope , cartridge , analytical chemistry (journal) , thin film , optics , chemistry , nanotechnology , metallurgy , chromatography , physics , composite material , mechanical engineering , organic chemistry , engineering
SUMMARY A dual purpose stage has been constructed for an EM6G 100 kV transmission electron microscope. With this stage the composition of thin films and bulk specimens can be determined by X‐ray microanalysis. With thin films a change of specimen cartridge then enables a full analysis of crystal defects in the film to be made using tilt controls incorporated in the stage. Modifications to the stage to reduce background effects in X‐ray microanalysis spectra are also described. The alternative use of this system in the bulk analysis of specimens by an X‐ray fluorescence technique is also discussed.